High Temperature Vacuum Sintering

  • The High Temperature vacuum furnace is used for sintering of the silicon nitride material.
  • The sintering of Silicon Nitride ceramics will be done in Nitrogen Atmosphere at high temperature.
  • The maximum temperature of the furnace is 1700 deg C.
  • The furnace consists of inner vacuum chamber. The chamber has high temperature ceramic fiber boards insulation.
  • MoSi2 heaters are used to achieve the desired temperature.
  • The system also has vacuum system to achieve the vacuum of 10-3 mbar inside the chamber.
  • The vacuum system will consist of Mechanical rotary pump and backing roots pump of leybold make.
  • There is also two stage gas manifold system to purge the nitrogen gas inside the furnace during the sintering process.
  • The furnace will be vacuum in dry cold conditions with vacuum range 10-3 mbar using vacuum system, after that Nitrogen will be purge inside the chamber with controlled flow rate using rotameter and sintering process of silicon Nitride starts.
  • The sintering process temperature will be approx 1650 Deg C.
  • Programmable PID temperature controller will be used to get the desired temperature cycle.